MX_099 – 9000

Thanks to the flexures’s linear guides, this linear stage has intrinsically an outstanding precision, reliability and dynamics. Absolutely free of friction, wear and backlash, this device perfectly fit clean rooms and vacuum requirements. The robust design insures high spatial stiffness in all transvers directions and very high eigen frequencies required for high dynamics applications. The minimum incremental motion is not mechanically limited and is, according with the sensor resolution, in sub-nanometre range.

Magnetic Direct Drive and Optical linear scale
The voice-coil drives combined with an optical linear scale, makes this device completely friction free and according with sub nanometre sensor resolutions, the minimum incremental motion is also in the same sub-nanometre field.

Fields of application
Industry and research with very high accuracy, dynamic, cleanliness requirements.